Presenting the latest experimental data, this state-of-the-art book explores the potential of using MEMS and NT in sensors and devices. It describes packaging details, materials and their properties, and fabrication requirements vital for design, development, and testing. The book encompasses various types of MEMS- and NT-based sensors and devices, such as micropumps, accelerometers, photonic bandgap devices, acoustic sensors, CNT-based transistors, photovoltaic cells, and smart sensors. It also discusses how these sensors and devices are used in a number of applications, including weapons' health, battlefield monitoring, cancer research, stealth technology, chemical detection, and drug delivery.
- Publication Date:
- 08 / 04 / 2008