Mems and Microsystems: Design, Manufacture, and Nanoscale Engineering, Second Edition

MEMS & Microsystems provides an engineering design approach to MEMS and microsystems, appropriate for professionals and senior level students. Numerous examples, cases, and applied problems are provided. It includes numerous examples, cases, and applied problems and covers both sides of the technology by carefully explaining the electrical/electronic aspects while providing strong coverage of the mechanical side of MEMS, dual coverage that no other textbook provides. This new edition presents new and expanded coverage of microfabrication and assembly & packaging technologies and a new chapter covering nanotechnology nanoscale engineering.